Enhanced evanescent prism coupling system and method for characterizing stress in chemically strengthened bending components

• Main Authors: WETMORE NATHANIEL DAVID, ROUSSEV ROSTISLAV VATCHEV
• Format: Patent
• Language: Chinese; English
• Published: 30.08.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Methods and apparatus for obtaining a corrected digital mode spectrum of a chemically strengthened (CS) substrate having a curved surface are disclosed. The method includes digitally capturing lateral magnetic (TM) and lateral electrical (TE) mode spectra of the CS substrate using an evanescent prism coupling system with system calibration for measuring the flat CS substrate to form a digital mode spectral image. The method further includes establishing a calibration correction based on a difference in the digitally captured TM and TE mode spectra compared to the reference TM and TE mode spectra of the reference CS substrate. The calibration correction is applied to the digital-mode spectral image to form a corrected digital-mode spectral image that can be processed using system calibration for measuring the flat CS substrate to determine the refractive index profile and stress characteristics of the curved CS substrate. 公开了用于获得具有弯曲表面的化学强化(CS)基板的经校正数字模式光谱的方法和装置。所述方法包括使用具有用于测量平坦CS基板的系统校准的倏逝棱镜耦合系统以数字方式捕获CS基板的横向