Optical element cleaning treatment device and method

• Main Authors: ZHOU GUORUI, MIAO XINXIANG, XIANG SIHENG, NIU LONGFEI, MA ZHIQIANG, YAO CAIZHEN, ZHU QIHUA, JIANG XIAODONG, JIANG YILAN, YOU HUI, ZOU RUI
• Format: Patent
• Language: Chinese; English
• Published: 13.08.2024
• Subjects: CLEANING; CLEANING IN GENERAL; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PREVENTION OF FOULING IN GENERAL; TRANSPORTING

The invention discloses an optical element cleaning treatment device which comprises a laser constraint unit and an electrostatic adsorption unit, and the laser constraint unit comprises a laser system and a beam shaping system. The invention provides an optical element cleaning treatment method which comprises the following steps: shaping a laser beam emitted by a laser system into a Gaussian beam by using a beam shaping system, and enabling an electric field generated by an electrostatic adsorption unit to cover a Gaussian light field; and the starting time of the laser constraint unit and the electrostatic adsorption unit is controlled to be synchronous with the light passing time of the optical element, so that the flight path of the damaged splashing ions passes through the Gaussian light field and the electric field generated by the electrostatic adsorption unit, and the Gaussian light field is utilized to control the particles to move towards the electrostatic adsorption unit and the particles are adso