Vacuum pump with reduced sealing requirements

The present disclosure relates to a vacuum pump (10) comprising a substantially hermetically sealed housing (40), a core pump assembly located within the housing (40), and an inert purge gas inlet (70) fluidly connected to the housing (40) for supplying an inert purge gas to an interior of the housi...

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Bibliographic Details
Main Authors SCHOFIELD NIGEL PAUL, HOLBROOK ALAN ERNEST KINNAIRD, LONG CAINAN
Format Patent
LanguageChinese
English
Published 09.08.2024
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Summary:The present disclosure relates to a vacuum pump (10) comprising a substantially hermetically sealed housing (40), a core pump assembly located within the housing (40), and an inert purge gas inlet (70) fluidly connected to the housing (40) for supplying an inert purge gas to an interior of the housing (40) surrounding the core pump assembly so as to apply an inert positive pressure to the core pump assembly, this reduces leakage of process gases from the core pump assembly, such that seals therein, particularly costly process-sensitive elastomeric seals, can be removed or reduced. 本公开涉及真空泵(10),其包括基本上气密地密封的外壳(40)、位于外壳(40)内的核心泵组件、以及流体地连接到外壳(40)以用于将惰性净化气体供应到围绕核心泵组件的外壳(40)的内部的惰性净化气体入口(70),以便将惰性正压力施加到核心泵组件,这减少了工艺气体从核心泵组件的泄漏,使得其中的密封件可被去除或减少,所述密封件尤其是昂贵的工艺敏感的弹性体密封件。
Bibliography:Application Number: CN20228085206