Clean room compatible robotic end effector exchange system

• Main Authors: DI REGOLO JOSEPH A, CLARK BENJAMIN J T, PRESSBERG THOMAS, WISEMAN ANDREW, BRISSMAN MICHAEL
• Format: Patent
• Language: Chinese; English
• Published: 09.08.2024
• Subjects: CHAMBERS PROVIDED WITH MANIPULATION DEVICES; HAND TOOLS; MANIPULATORS; PERFORMING OPERATIONS; PORTABLE POWER-DRIVEN TOOLS; TRANSPORTING

A system includes a robot interface disposed on a robot arm and an end effector configured to be selectively coupled to the robot arm via the robot interface. The end effector includes an upper jaw, a lower jaw, and a pair of arms configured to carry a substrate. The upper jaw portion and the lower jaw portion are spaced apart and biased together in a first direction, and the pair of arms are spaced apart in a second direction orthogonal to the first direction. The robot interface is disposed between the upper jaw portion and the lower jaw portion when the end effector is coupled to the robot arm. To exchange the end effector, the upper jaw portion and the lower jaw portion may be separated to release the robotic interface. 系统包含安置于机器人手臂上的机器人接口及经配置以经由所述机器人接口选择性地耦合到所述机器人手臂的末端执行器。所述末端执行器包含上颚部、下颚部及经配置以携载衬底的一对臂。所述上颚部与所述下颚部在第一方向上间隔开且被偏置在一起，且所述一对臂在正交于所述第一方向的第二方向上间隔开。当所述末端执行器耦合到所述机器人手臂时，所述机器人接口安置于所述上颚部与所述下颚部之间。为了交换所述末端执行器，可分离所述上颚部与所述下颚部以释放所述机器人接口。