SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

• Main Authors: WOO JONG-HO, LU YINGZHI, WOO MYUNG-HUN, KANG JOO-HEON
• Format: Patent
• Language: Chinese; English
• Published: 30.07.2024
• Subjects: ELECTRICITY

The invention provides a semiconductor device and an electronic system. The semiconductor device includes: a cell array structure on a semiconductor substrate, the cell array structure including an electrode structure including electrodes and insulating layers vertically and alternately stacked on the semiconductor substrate; and a vertical structure penetrating the electrode structure and a penetrating contact plug. The vertical structure may include a first inner layer, a first outer layer, and a first intermediate layer, and the through contact plug may include a second inner layer, a second outer layer, and a second intermediate layer. The electrode may include a doped semiconductor material, and the first outer layer and the second outer layer may include the same material. The first intermediate layer and the second intermediate layer may include the same material, and the first inner layer and the second inner layer may include different materials from each other. 提供了一种半导体装置和电子系统。该半导体装置包括：半导体衬底上的单元阵列结构