MEMS element

A MEMS element in which a back plate (7) including a fixed electrode (5) and a diaphragm (3) including a movable electrode are disposed facing each other with a gasket (4) therebetween on a substrate (1) provided with a back cavity (9), the diaphragm (3) is provided with a pillar (11) connected to t...

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Bibliographic Details
Main Author FUKUTOME TAKAO
Format Patent
LanguageChinese
English
Published 12.07.2024
Subjects
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
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Summary:A MEMS element in which a back plate (7) including a fixed electrode (5) and a diaphragm (3) including a movable electrode are disposed facing each other with a gasket (4) therebetween on a substrate (1) provided with a back cavity (9), the diaphragm (3) is provided with a pillar (11) connected to the back plate (7), a pillar-side slit (12), and a peripheral edge-side slit (13), and a plurality of vibrating parts (14) are formed on the diaphragm (3). The central part of the vibrating diaphragm (3) is connected with the back plate (7) through the column (11), so that the amplitude of the central part of the vibrating diaphragm (3) can be suppressed. Each of the plurality of vibrating parts is provided with a column-side slit (12) on the junction side of the column (11) and the vibrating diaphragm (3), and is provided with a peripheral-edge-part-side slit (13) on the peripheral edge part, whereby the difference between the amplitude amounts of the central part and the peripheral edge part of the vibrating diaph
Bibliography:Application Number: CN202280078883