Component for manufacturing micro-and/or nano-structured devices and method for manufacturing same

The invention relates to a component (32) for manufacturing micro-and/or nano-structured devices and a method for manufacturing the same, the component having a base body (33) and a surface (34) with micro-or nano-structures (48), the surface forming substantially flat support surfaces (52), and tre...

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Bibliographic Details
Main Authors VOGLER UWE, SARCLETTI MARCO
Format Patent
LanguageChinese
English
Published 12.07.2024
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
ELECTROGRAPHY
HOLOGRAPHY
MACHINE TOOLS
MATERIALS THEREFOR
METAL-WORKING NOT OTHERWISE PROVIDED FOR
ORIGINALS THEREFOR
PERFORMING OPERATIONS
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SOLDERING OR UNSOLDERING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
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Summary:The invention relates to a component (32) for manufacturing micro-and/or nano-structured devices and a method for manufacturing the same, the component having a base body (33) and a surface (34) with micro-or nano-structures (48), the surface forming substantially flat support surfaces (52), and trenches (54) extending in a statistical distribution between the support surfaces, to which a vacuum can be applied. 本发明涉及一种用于制造微米和/或纳米结构装置的部件(32)及其制造方法，该部件具有基座主体(33)和具有微米或纳米结构(48)的表面(34)，该表面形成了基本上平坦的支撑表面(52)，并且沟槽(54)在支撑表面之间以统计分布延伸，可以对该沟槽施加真空。
Bibliography:Application Number: CN202410047981