Surface acoustic wave device

• Main Authors: LAI ZHENGYAO, ZHANG JIADA, YANG YAZHU, XU MENGZE
• Format: Patent
• Language: Chinese; English
• Published: 05.07.2024
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

A surface acoustic wave device includes: a substrate; the finger part of the interdigital transducer electrode is arranged on the substrate; a pad portion of the interdigital transducer electrode electrically connected to the finger portion; and a line electrode disposed on the pad portion. The line electrode comprises a contact metal layer and an aluminum base layer. The contact metal layer is disposed between the pad portion and the aluminum base layer. The contact metal layer includes platinum, palladium, or gold. The performance of the surface acoustic wave device can be improved. 一种表面声波装置包括：衬底；交叉指型换能器电极的指部，设置于衬底上；交叉指型换能器电极的垫部，电连接至指部；以及线路电极，设置于垫部上。线路电极包括接触金属层和铝基层。接触金属层设置于垫部与铝基层之间。接触金属层包括铂、钯、或金。本发明可以改善表面声波装置的性能。