Wafer image clustering method and device, equipment and storage medium

• Main Authors: YAN CHANGLIAN, DING NUO, ZHANG YAN, SONG HONGMIN, HAN CHUNYING, LI DONGHONG
• Format: Patent
• Language: Chinese; English
• Published: 25.06.2024
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

The invention provides a wafer image clustering method and device, electronic equipment and a computer readable storage medium, and the method comprises the steps: generating a binary image corresponding to a wafer image based on the wafer image containing a defect crystal grain; generating topological structure information of the defective crystal grain based on pixel information of the defective crystal grain in the binary image; generating a contour image corresponding to the binary image based on the topological structure information; based on a contour list corresponding to a contour curve in the contour image, performing pixel filling on a contour area in the contour image to generate a filling image; and marking each contour region in the filling image as a clustering result. Therefore, the effect of quickly clustering the wafer image can be achieved without any presetting, the time cost required by a clustering algorithm is reduced, and the clustering efficiency is improved. 本申请提供一种晶圆图像的聚类方法、装置、电子设备及计