Laser direct writing device and laser direct writing method

• Main Authors: KUANG CUIFANG, ZHU DAZHAO, ZHAN GANGYAO, WEN JISEN, LUO MENGDI
• Format: Patent
• Language: Chinese; English
• Published: 25.06.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The invention relates to a laser direct writing device and a laser direct writing method, and the laser direct writing device sequentially comprises a laser, a polarization phase joint modulation module and a scanning direct writing module in a light path propagation direction, the polarization phase joint modulation module sequentially comprises a first half-wave plate, a polarization splitting prism, a second half-wave plate, a vortex wave plate and a spiral phase plate in the light path propagation direction. 本发明涉及一种激光直写装置及激光直写方法，在光路传播方向上依次包括激光器、偏振相位联合调制模块和扫描直写模块，其中，所述偏振相位联合调制模块在光路传播方向上依次包括第一半波片、偏振分光棱镜、第二半波片、涡旋波片和螺旋相位片。