Solar cell and preparation method thereof

• Main Authors: DENG WEIWEI, WANG XUSHENG, YE XIAOYA
• Format: Patent
• Language: Chinese; English
• Published: 21.06.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention provides a solar cell and a preparation method thereof, and the method comprises the following steps: selecting an N-type silicon wafer, and carrying out the texturing of the front surface of the N-type silicon wafer; forming a mask layer for protecting the textured surface on the front surface of the textured silicon wafer, wherein the mask layer is an amorphous silicon layer, or a silicon oxide layer, or a laminated structure of the silicon oxide layer and the amorphous silicon layer; a P + emitter is formed on the front face through high-temperature boron diffusion, and the mask layer is oxidized to form a front face BSG layer. According to the preparation method, after texturing, the mask layer is deposited on the front surface and then boron diffusion is carried out, the mask layer protects the pyramid in the subsequent process, and it is guaranteed that the front surface has low reflectivity; and the mask layer forms a front BSG layer in the boron diffusion process, so that silicon wafer l