Support unit, wire storage unit comprising support unit, and transport system

A support unit is provided. The support unit supports a transport member including a first reservoir having two or more first apexes formed at a bottom thereof and a second reservoir having two or more second apexes formed at a bottom thereof and storing articles including substrates or consumables...

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Bibliographic Details
Main Author KIM DO-HYUN
Format Patent
LanguageChinese
English
Published 14.06.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A support unit is provided. The support unit supports a transport member including a first reservoir having two or more first apexes formed at a bottom thereof and a second reservoir having two or more second apexes formed at a bottom thereof and storing articles including substrates or consumables for manufacturing semiconductor devices. The second reservoir has a second apex formed at a bottom thereof but located at a different position from the first apex, the support unit comprising: a base forming a bottom surface; a first block portion disposed on the base portion and including a first anti-separation surface on which the first apex is positioned, and which faces or abuts against a circumferential surface or a corner portion of the first reservoir; and a second block portion disposed on the first block portion and including a second anti-separation surface on which the second apex is positioned, and which faces or abuts against a circumferential surface or a corner portion of the second reservoir. 提供了一种
Bibliography:Application Number: CN202310359448