Gas and liquid environment pressure intensity sensor based on optical microcavity

• Main Authors: HOU LINSONG, WEI HEMING, ZHU MENGSHI, PANG FUFEI, REN DONGNI
• Format: Patent
• Language: Chinese; English
• Published: 14.06.2024
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The invention provides a gas and liquid environment pressure sensor based on an optical microcavity, and relates to the technical field of optical sensing. The sensor is integrally formed and prepared by adopting a two-photon 3D micro-nano printing technology, and comprises an optical sensing structure, an anti-reflection structure, a liquid drainage channel and an auxiliary sealing structure, the optical sensing structure is a micro-cavity structure based on Fabry-Perot interference, and the anti-reflection structure is located in a non-sensing area of the optical sensing structure and is used for inhibiting the Fabry-Perot interference effect in the non-sensing area of the sensor; the drainage channel penetrates through the optical sensing structure and is communicated with an auxiliary sealing structure outside the optical sensing structure; the liquid discharging channel is sealed by liquid glue flowing through the auxiliary sealing structure. The invention has the characteristics of simple preparation, s