Threaded nozzle insert

A threaded nozzle insert for a semiconductor processing tool showerhead or gas distributor is disclosed. 公开了用于半导体加工工具喷淋头或气体分配器的螺纹喷嘴插件。

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Bibliographic Details
Main Authors BUSSAN, JOHN, EDWARD, GONG BO, CHITIKIS, VAMSI, KRISHNA, ZHANG JINGYUN, KULKARNI, PRASANNA, GUO TONGTONG, BATZER RACHEL E
Format Patent
LanguageChinese
English
Published 11.06.2024
Subjects
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
ATOMISING APPARATUS
NOZZLES
PERFORMING OPERATIONS
SPRAYING APPARATUS
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
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Summary:A threaded nozzle insert for a semiconductor processing tool showerhead or gas distributor is disclosed. 公开了用于半导体加工工具喷淋头或气体分配器的螺纹喷嘴插件。
Bibliography:Application Number: CN202311688399