High-brightness laser plasma light source and method for generating and collecting radiation

• Main Authors: RUSH, ALASTAIR, A, MEDVEDEV VIACHESLAV VLADIMIROVICH, KOSHELEV KONSTANTIN NIKOLAEVICH, HERVY SEBASTIEN, KRISTOFOROV, OLEG BORISOVICH, IVANOV, VLADIMIR VITALEVICH, KRIVSEN, VLADIMIR MIHAILOVITCH, GLUSHKOV DMITRIY ALEKSANDROVICH, KRIVKOLETOV MAKSIM SERGEEVICH, VINOKHODOV ALEXEI YURIEVITCH
• Format: Patent
• Language: Chinese; English
• Published: 04.06.2024
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; X-RAY TECHNIQUE

A laser plasma light source comprises a vacuum chamber (1), a rotating target assembly (2) which supplies a target (3) to an interaction zone (4) with a focused laser beam (5). The target is a molten metal layer on a surface of an annular groove of the target assembly. The output light beam (7) of the short wavelength radiation leaves the interaction zone and reaches the optical collector (8) through fragment mitigation means (12-16). The linear velocity of the target is preferably not less than 100 m/s, and the linear velocity vector of the target in the interaction zone is directed on one side of a plane (18) passing through the interaction zone and the axis of rotation (6) while the focused laser beam and the output beam lie on the other side of said plane. 一种激光等离子体光源，包括真空室(1)、旋转靶组件(2)，其将靶(3)供应给具有聚焦激光束(5)的相互作用区(4)。靶是靶组件的环形槽的表面上的熔融金属层。短波长辐射的输出光束(7)离开相互作用区经过碎片减缓装置(12-16)到达光学收集器(8)。靶的线速度优选不小于100m/s，并且将在相互作用区中靶的线速度矢量引导到穿过相互作用区和旋转轴(6)的平面(18)的一侧上，而聚焦激光束和输出光束位于所述平面的另一侧上。