Zero-mode waveguide chip, preparation method thereof and zero-mode waveguide detection system

• Main Authors: ZHANG YUEYE, LI CHAO, ZHOU LIANQUN, LIU XUANSHUO, GUO ZHEN, HUANG RUNHU, ZHANG ZHIQI, LI JINZE, LI CHUANYU, YAO JIA, ZHANG WEI, GAO QINGXUE
• Format: Patent
• Language: Chinese; English
• Published: 04.06.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEASURING; NANOTECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TESTING; TRANSPORTING

The invention relates to the technical field of semiconductor devices, and discloses a zero-mode waveguide chip, a preparation method thereof and a zero-mode waveguide detection system. The zero-mode waveguide chip comprises a semiconductor substrate, a first film layer and a second film layer, the first film layer is arranged on the semiconductor substrate, and first nanopores are formed in the first film layer; the second film layer is arranged between the semiconductor substrate and the first film layer, and second nano holes are formed in the second film layer; the second nano-pore is communicated with the first nano-pore and is suitable for forming an excitation area for arranging a sample to be detected, and the radial size of the second nano-pore is smaller than that of the first nano-pore. The fluorescence emission light irradiates the surface of the second film layer of the double-layer nanopore structure, a strong local field is formed near the second nanopore, and an excitation region is limited in