Polymer-based annular resonant cavity mesh sensing array multifunctional sensor

• Main Authors: HAN MING, XIE FANGLIN, LI HONGQIANG, REN FENG, DING MINGJUN, LIN ZHILIN, MA SHUAI, ZHANG LIZHEN
• Format: Patent
• Language: Chinese; English
• Published: 04.06.2024
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

The invention discloses a polymer-based annular resonant cavity net-shaped sensing array multifunctional sensor, which is characterized in that an annular resonant cavity net-shaped sensing array is an array consisting of M * N annular resonant cavities with consistent structural parameters, and is made of a polymer material with low Young modulus and high thermo-optic coefficient; after the annular waveguide structure or the effective refractive index is changed, the resonance peak of the annular resonant cavity shifts, and the detected quantity can be represented by detecting the offset; according to different sensing mechanisms, temperature and stress detection can be realized. The sensor can be respectively used for temperature and stress detection, can position the stress position, and has the advantages of being capable of detecting multiple sensing quantities, high in sensitivity and easy to integrate. 本发明公开了一种聚合物基环形谐振腔网状传感阵列多功能传感器，其中：所述的环形谐振腔网状传感阵列为由M×N个结构参数一致的环形谐振腔组成的阵列，采用低杨氏模量和高热光系数的聚合物材料制成；在环形波导结构或