Temperature calibration method, device and system

The invention relates to a temperature calibration method, a temperature calibration device and a temperature calibration system, which are used for performing temperature calibration on semiconductor equipment. Comprises: obtaining a target temperature; obtaining the temperature of a correction she...

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Bibliographic Details
Main Authors HUANG QIBING, CHEN XUANYU
Format Patent
LanguageChinese
English
Published 28.05.2024
Subjects
CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Summary:The invention relates to a temperature calibration method, a temperature calibration device and a temperature calibration system, which are used for performing temperature calibration on semiconductor equipment. Comprises: obtaining a target temperature; obtaining the temperature of a correction sheet, wherein the correction sheet is placed on a correction disc in the semiconductor equipment; acquiring a temperature correction value according to the temperature of the correction sheet and the target temperature; and correcting the heating temperature according to the temperature correction value. According to the temperature calibration method, the temperature correction value is obtained by applying the temperature of the correction sheet and the target temperature, and then the heating temperature is corrected, so that the temperature of the correction sheet can be adjusted in real time, and the difference value between the temperature of the correction sheet and the target temperature is reduced; therefore
Bibliography:Application Number: CN202211439153