Polycrystalline composite Mg-Ni-Ti alloy film and preparation method and application thereof

• Main Authors: LU JIAHUAN, HUANG LIANGJUN, LIU JIANGWEN, OUYANG LIUZHANG, TAN JIAYAO, SHIN HAN-HO, WANG HUI, ZENG MEIQIN, ZHU MIN
• Format: Patent
• Language: Chinese; English
• Published: 28.05.2024
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; ALLOYS; APPARATUS THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOUNDS THEREOF; CRYSTAL GROWTH; DIFFUSION TREATMENT OF METALLIC MATERIAL; FERROUS OR NON-FERROUS ALLOYS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TREATMENT OF ALLOYS OR NON-FERROUS METALS; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

The invention provides a polycrystalline composite Mg-Ni-Ti alloy film and a preparation method and application thereof, and belongs to the technical field of hydrogen storage materials. According to the preparation method, the Mg-Ni-Ti alloy film is prepared from the Mg target material and the NiTi target material by adopting a magnetron sputtering co-sputtering method, and the components and the morphology of the film are regulated and controlled by controlling the sputtering power and the sputtering time of each target position. In the Mg-Ni-Ti alloy film prepared by the invention, an Mg2Ni alloy phase formed by Ni and Mg and elemental Ti play a synergistic catalysis role, so that synergistic modification of nanocrystallization, alloying and catalysis is realized, and the dehydrogenation performance of the film is greatly improved; the preparation method is simple in film forming process, the obtained film is uniform in component, the structure and the component are convenient to regulate and control, and