Method and device for measuring bandwidth increase

• Main Authors: MOSSAVAT SEYED IMAN, HINNEN PAUL CHRISTIAAN, CRAMER HUGO AUGUSTINUS JOSEPH
• Format: Patent
• Language: Chinese; English
• Published: 24.05.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

There is disclosed a method for measuring a measurement application (335; 340, 340; 345) for optimizing (300) the bandwidth of a measured illumination, and an associated metrology device. The method comprises: performing (305) a reference measurement with a reference measurement illumination having...