Substrate holder, substrate holding method, and film forming apparatus

The invention provides a substrate holder, a substrate holding method, and a film forming apparatus. The substrate holder is provided with: a hole part in which the disc-shaped substrate is vertically arranged; and at least four support members attached to the periphery of the hole so as to be elast...

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Bibliographic Details
Main Authors YOSHINO SATOSHI, NOGAMI KENGO, TAMURA CHIHIRO
Format Patent
LanguageChinese
English
Published 10.05.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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