Substrate holder, substrate holding method, and film forming apparatus

• Main Authors: YOSHINO SATOSHI, NOGAMI KENGO, TAMURA CHIHIRO
• Format: Patent
• Language: Chinese; English
• Published: 10.05.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention provides a substrate holder, a substrate holding method, and a film forming apparatus. The substrate holder is provided with: a hole part in which the disc-shaped substrate is vertically arranged; and at least four support members attached to the periphery of the hole so as to be elastically deformable, two of the four support members support the disc-shaped substrate at a first-side outer peripheral end and a second-side outer peripheral end of the disc-shaped substrate positioned on the upper side of the disc-shaped substrate in the vertical direction, and the other two of the four support members support the disc-shaped substrate at a first-side outer peripheral end and a second-side outer peripheral end of the disc-shaped substrate positioned on the upper side of the disc-shaped substrate in the vertical direction. A third-side outer peripheral end portion and a fourth-side outer peripheral end portion of the disc-shaped substrate located on the lower side of the disc-shaped substrate in the