Reference box for direct drive radio frequency power supply

• Main Authors: DREWERY, JOHN, HART, WILLIAM, T, O 'NEILL ROBERT GRIFFITH, PATTERSON ALEXANDER MILLER, ALBAREDE LUC, OCAMPO NEIL SIMON, WANG YUHOU, MARTIN MICHAEL JOHN, SILADIE CRISTIAN, GUZMAN DANIEL, DRIMON MICHAEL
• Format: Patent
• Language: Chinese; English
• Published: 07.05.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

A radio frequency calibration system for a direct drive radio frequency power supply includes a reference box including a reference circuit for converting a non-reference input impedance to a reference output impedance. The reference box has an input connector electrically connected to a radio frequency output coupling of the direct drive radio frequency power supply. A radio frequency power meter has a radio frequency power input electrically connected to the output connector of the reference box. The radio frequency power meter has an input impedance and an output impedance that substantially matches the reference output impedance of the reference box. The cable has a first end electrically connected to the radio frequency power output of the radio frequency power meter and a second end connected to a test load having an impedance substantially matching the reference output impedance of the reference box. And the controller is in data communication connection with the data interface of the radio frequency p