Preparation method applied to 2.5-dimensional heterogeneous integrated optical waveguide

The invention discloses the preparation method applied to the 2.5-dimensional heterogeneous integrated optical waveguide for the first time, the novel 2.5-dimensional heterogeneous integration is defined in detail, and a novel preparation method is provided for the 2.5-dimensional heterogeneous inte...

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Bibliographic Details
Main Authors CHEN CHAOYANG, GUAN XIAOWEI, WANG YAN, FU MEICHENG
Format Patent
LanguageChinese
English
Published 03.05.2024
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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