Preparation method applied to 2.5-dimensional heterogeneous integrated optical waveguide

• Main Authors: CHEN CHAOYANG, GUAN XIAOWEI, WANG YAN, FU MEICHENG
• Format: Patent
• Language: Chinese; English
• Published: 03.05.2024
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The invention discloses the preparation method applied to the 2.5-dimensional heterogeneous integrated optical waveguide for the first time, the novel 2.5-dimensional heterogeneous integration is defined in detail, and a novel preparation method is provided for the 2.5-dimensional heterogeneous integration technology. According to the preparation method, the aluminum oxide film is ingeniously used as an etching protection layer, and tedious processes such as polishing, alignment, bonding and bonding can be avoided. Compared with three-dimensional heterogeneous integration, the 2.5-dimensional heterogeneous integration provided by the invention is simpler and more convenient in design, higher in precision, simpler in preparation steps and easy to manufacture. According to the invention, a novel 2.5-dimensional heterogeneous integration manufacturing method and basic technical support can be provided for a heterogeneous integration technology. 本发明首次公开了一种应用于2.5维异质集成光波导的制备方法，对新型"2.5维"异质集成进行详细的定义，并为2.5维异质集成技术提供一种新