Piezoelectric flexible MEMS ultrasonic transducer and preparation process

• Main Authors: LUO RUIYAN, TAN HONGQIANG, MA QI, LI JIE, WANG TONG, ZHAO LIBO, ZHAO ZILONG, LI JIAZHU, ZHAO YIHE, LI ZIXUAN, YUAN JIAWEI, LI ZHIKANG, SHI XUAN, ZHANG SHIWANG, YUAN ZHENG, QIN SHAOHUI, QIN HEFENG, WANG XIAOZHANG
• Format: Patent
• Language: Chinese; English
• Published: 19.04.2024
• Subjects: FOR PERFORMING MECHANICAL WORK IN GENERAL; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY; PERFORMING OPERATIONS; TRANSPORTING

The invention discloses a piezoelectric flexible MEMS (Micro Electro Mechanical System) ultrasonic transducer and a preparation process thereof. The process steps of the piezoelectric flexible MEMS ultrasonic transducer are manufactured by adopting a standard MEMS process. The outer wrapping of the transducer is made of a flexible material, and the electrode material is a flexible material. According to the manufacturing method, high efficiency and mass production in manufacturing are ensured according to an MEMS (Micro-Electro-Mechanical System) process; the overall flexibility of the device is ensured by using the wrapping of a flexible material; the flexible electrode and the snakelike circuit are utilized to ensure that the flexible electrode has flexible functions of bending, twisting, stretching and the like; and high consistency in manufacturing is ensured by using specific manufacturing standards. 本发明公开了一种压电式柔性MEMS超声换能器及制备工艺，其工艺步骤均采用标准的MEMS工艺进行制造。换能器的外包裹为柔性材料，电极材料均为柔性材料。本发明利用其制造按照MEMS工艺来保证制造中的高效率、大批量生