Electrostatic chuck device

• Main Authors: MORISHITA NORITO, YOSHIOKA YOSHIKI, MAEDA KEISUKE, ITAGAKI TETSURO
• Format: Patent
• Language: Chinese; English
• Published: 16.04.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; SEMICONDUCTOR DEVICES

An electrostatic chuck device is provided with: an electrostatic chuck plate having a dielectric substrate provided with a mounting surface on which a sample is mounted, and an adsorption electrode positioned inside the dielectric substrate; and a base which supports the electrostatic chuck plate from the opposite side of the mounting surface, in which a first through hole for supplying gas to the mounting surface is provided in the electrostatic chuck plate, a porous body through which the gas passes is inserted in the first through hole, and a second through hole through which the gas passes is inserted between the inner peripheral surface of the first through hole and the outer peripheral surface of the porous body. A first adhesive layer that adheres the inner peripheral surface and the outer peripheral surface to each other is provided, and the thickness dimension of the first adhesive layer is 0 mm or more and 0.15 mm or less at least in a region up to 0.1 mm from the placement surface. 一种静电卡盘装置，其具备：静电卡