Low-surface-density flexible substrate for thin film solar cell and preparation method of low-surface-density flexible substrate

• Main Authors: GUO ZHEJUN, WANG XIN, WANG XUNCHUN, SHI XIANGLEI, LI BIN, WANG BO, ZHOU LIHUA, QIAN YONG, SUN LIJIE
• Format: Patent
• Language: Chinese; English
• Published: 16.04.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses a low-surface-density flexible substrate for a thin film solar cell and a preparation method of the low-surface-density flexible substrate. The substrate is characterized in that the substrate comprises a top metal layer (1), a middle polymer layer (2) and a bottom metal layer (4), a plurality of vertical through holes (3) are formed in the middle polymer layer (2), and conductive materials are filled in the through holes (3), so that the top metal layer (1) and the bottom metal layer (4) are electrically conducted. The method is characterized in that the intermediate polymer layer (2) forms a film by adopting a process mode of spin coating, spraying or brush coating, and is patterned by adopting a process mode of photoetching, mask etching or impressing; metal materials in the through holes (3) in the middle polymer layer (2) can be prepared by adopting sputtering, evaporation and electroplating processes. The thin film solar cell provided by the invention not only has good conductivi