Hot filament for thermal conductivity detector and preparation method thereof

• Main Authors: ZHOU WEI, ZHENG ZHANCHAO, GAO CHENXI, ZHAO WEIJUN, WANG XIAOZHI
• Format: Patent
• Language: Chinese; English
• Published: 16.04.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOUNDS THEREOF; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INORGANIC CHEMISTRY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEASURING; METALLURGY; NANOTECHNOLOGY; NON-METALLIC ELEMENTS; PERFORMING OPERATIONS; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TESTING; TRANSPORTING

The invention discloses a hot wire for a thermal conductivity detector and a preparation method of the hot wire. The preparation method comprises the following steps: etching a raw material hot wire; and depositing a low-dimensional nano material on the surface of the hot wire and the etching holes. According to the thermal conductivity detector, after micro-nano holes are etched through a hot wire, a low-dimensional nano material is deposited to generate a composite nano structure, and the composite nano structure is uniformly compounded on a microcosmic interface, so that the uniformity of the conductivity at each interface in each direction is realized, and the stability of the whole thermal conductivity device is ensured; the mechanical properties, such as tensile strength and the like, of the metal at high temperature are enhanced, so that a finer composite heat conducting wire can be prepared, and more sensitive detection is realized; the thermal conductivity detector using the hot wire has higher corro