Active vibration isolation system and equipment based on pressure valve and flow valve

The invention relates to the technical field of semiconductor equipment vibration isolation, in particular to an active vibration isolation system and equipment based on a pressure valve and a flow valve, and the system comprises a rigid mounting plate which is arranged below an equipment body and i...

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Bibliographic Details
Main Authors ZHENG CHUAN, XU SIQIANG
Format Patent
LanguageChinese
English
Published 12.04.2024
Subjects
BLASTING
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MEANS FOR DAMPING VIBRATION
MECHANICAL ENGINEERING
SHOCK-ABSORBERS
SPRINGS
THERMAL INSULATION IN GENERAL
WEAPONS
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Summary:The invention relates to the technical field of semiconductor equipment vibration isolation, in particular to an active vibration isolation system and equipment based on a pressure valve and a flow valve, and the system comprises a rigid mounting plate which is arranged below an equipment body and is connected with the equipment body; the bearing bases are distributed under the rigid mounting plate, vertical displacement sensors are connected to the bearing bases, and the vertical displacement sensors are used for detecting the vertical displacement of the rigid mounting plate; the air springs are located between the rigid mounting plate and the bearing base, the air springs are connected with the bearing base, and rolling pistons of the air springs are connected with the rigid mounting plate; the pressure intensity control unit is used for controlling the pressure intensity in the inner cavity of the air spring according to the electric signal of the vertical displacement sensor; the air spring can be conven
Bibliography:Application Number: CN202410181403