Cylindrical MEMS structure for audio components

• Main Authors: WILK CHRISTOPHER, ONUR I.IKORUR, HATYPOGLU, GEORGY, HRUDY PETER C
• Format: Patent
• Language: Chinese; English
• Published: 09.04.2024
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PUBLIC ADDRESS SYSTEMS

The invention relates to a cylindrical MEMS structure for an audio component. Aspects of the subject technology relate to an electronic device having a speaker, such as a micro-electro-mechanical system (MEMS) speaker. The MEMS speaker may include a cylindrical corrugated MEMS structure. The cylindrical corrugated MEMS structure may include a continuous MEMS structure having corrugations that extend around an open cylindrical core, the open cylindrical core being partially defined by internal pleats of the corrugations. The cylindrical corrugated MEMS structure is deformable in response to an applied voltage such that a portion of the cylindrical corrugated MEMS structure bends into and/or out of the open cylindrical core to push air out and/or draw air into the open cylindrical core. In one or more implementations, a MEMS speaker may include an array of cylindrical corrugated MEMS structures. 本公开涉及用于音频部件的圆柱形MEMS结构。本主题技术的各方面涉及电子设备，该电子设备具有扬声器，诸如微机电系统(MEMS)扬声器。MEMS扬声器可包括圆柱形波纹状MEMS结构。该圆柱形波纹状MEMS结构可包括连续MEMS结构，该连续