Semiconductor processing equipment

The invention provides semiconductor processing equipment. The semiconductor processing equipment comprises a positioning carrying disc, a clamping column unit and a control assembly, the clamping column unit comprises an axis part, a clamping part arranged at the top end of the axis part, a second...

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Bibliographic Details
Main Author YANG SHIPIN
Format Patent
LanguageChinese
English
Published 09.04.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The invention provides semiconductor processing equipment. The semiconductor processing equipment comprises a positioning carrying disc, a clamping column unit and a control assembly, the clamping column unit comprises an axis part, a clamping part arranged at the top end of the axis part, a second sealing ring arranged on the outer side of the axis part in a surrounding mode and clamped between the clamping part and the positioning carrying disc, a first connecting rod and a second elastic piece connected with the first connecting rod. An annular assembling base is axially arranged on the inner side of the positioning carrying disc, a second connecting rod longitudinally corresponding to the first connecting rod in position is constructed on the annular assembling base, the two ends of a second elastic piece are connected with the first connecting rod and the second connecting rod respectively and are kept in an initial stretching state, and the second elastic piece forms longitudinal downward elastic acting
Bibliography:Application Number: CN202410263804