Construction method of frequency drift-distance model based on tuning fork probe and distance control method

• Main Authors: WEI DONGSHAN, CUI HONGLIANG, SHE RONGBIN, LIU WENQUAN, LU YUANFU, LEE KWANG-WON
• Format: Patent
• Language: Chinese; English
• Published: 09.04.2024
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

The invention provides a method for constructing a frequency drift-distance model based on a tuning fork probe, and the method comprises the steps: obtaining a resonance current and the relative distance information between a needle point and a sample in real time when the vibrating needle point is...