Construction method of frequency drift-distance model based on tuning fork probe and distance control method

• Main Authors: WEI DONGSHAN, CUI HONGLIANG, SHE RONGBIN, LIU WENQUAN, LU YUANFU, LEE KWANG-WON
• Format: Patent
• Language: Chinese; English
• Published: 09.04.2024
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

The invention provides a method for constructing a frequency drift-distance model based on a tuning fork probe, and the method comprises the steps: obtaining a resonance current and the relative distance information between a needle point and a sample in real time when the vibrating needle point is controlled to approach the sample; acquiring frequency drift information based on the resonance current; a frequency drift-distance model is determined based on a mapping between the relative distance information and the frequency drift information. According to the invention, the problem of low efficiency of distance control based on a tuning fork probe in the prior art is solved. 本申请提供了一种基于音叉探针的频率漂移－距离模型的构建方法，包括：在控制振动的针尖靠近样品时，实时获取谐振电流以及针尖与样品之间的相对距离信息；基于所述谐振电流获取频率漂移信息；基于所述相对距离信息与所述频率漂移信息之间的映射确定频率漂移－距离模型。本申请解决了相关技术中基于音叉探针的距离控制的效率较低的问题。