Horizontal vacuum coating system and coating method thereof

• Main Authors: JIANG JIA, SHEN WEIZHENG, XU JIANZHU, LOU GUOMING, ZHENG BOHONG
• Format: Patent
• Language: Chinese; English
• Published: 09.04.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses a horizontal vacuum coating system, which comprises a feeding and discharging cavity, a feeding and discharging cavity, a feeding and discharging cavity, a feeding and discharging cavity, a feeding and discharging cavity and a feeding and discharging cavity, the process cavity is used for carrying out magnetron sputtering coating on the workpiece to be coated; the heating cavity is used for heating the workpiece to be coated before coating; the conveying assembly is used for conveying the workpieces to be coated into and out of the chambers; and the cathode chamber is used for mounting a target material, is arranged in the process cavity and is positioned below the conveying assembly. According to the horizontal vacuum coating system, the high cleanliness in the heating cavity can be kept, the coating effect is further guaranteed, only one ten-stage feeding and discharging chamber needs to be arranged, the equipment cost is greatly reduced, and the equipment occupied area is also reduc