Preparation method of micro-nano three-dimensional structure based on nano-probe

• Main Authors: XUE ZHAOGUO, BAI KE, LAI YUCHEN, LV ZENGYAO, LAN YU, WANG YUEJIAO, SHUAI YUMENG, ZHANG YIHUI, BAI RENHENG, ZHAO JIANZHONG
• Format: Patent
• Language: Chinese; English
• Published: 09.04.2024
• Subjects: MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MICROSTRUCTURAL TECHNOLOGY; NANOTECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TRANSPORTING

The invention provides a preparation method of a micro-nano three-dimensional structure based on a nanoprobe. The preparation method comprises the following steps: S1, arranging a sacrificial layer and a thermoplastic polymer layer on a substrate; and S2, depositing a metal layer on the thermoplastic polymer layer, etching the metal layer through a micromachining process to form a patterned metal layer, etching the thermoplastic polymer layer, and removing the sacrificial layer coated on the substrate to form a two-dimensional precursor. And S3, applying a load to the two-dimensional precursor by using one or more nano probes and moving the nano probes to drive the part, in contact with the tip of the nano probe, of the two-dimensional precursor to move, so that the structure of the two-dimensional precursor is deformed, and a three-dimensional micro-nano structure is formed. And S4, the three-dimensional micro-nano structure is heated to generate thermoplasticity, and the shape fixing of the three-dimensiona