Integrated analysis module for determining performance of processing device

• Main Authors: OH MOON-KYU, CANTWELL DERMOT, LI WEILI, HAN HUILING
• Format: Patent
• Language: Chinese; English
• Published: 05.04.2024
• Subjects: CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; COUNTING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING

A method includes receiving, by a processing device, first data indicative of a processing recipe. The method further includes receiving second data. The second data includes operational data associated with the processing recipe. The method further includes receiving third data. The third data includes historical data associated with the processing recipe. The method further includes performing an analysis indicative of performance of the processing chamber based on the first data, the second data, and the third data. The method further includes causing a corrective action to be performed according to the analysis. 一种方法包括通过处理装置接收指示处理配方的第一数据。方法进一步包括接收第二数据。第二数据包括与处理配方相关联的操作数据。方法进一步包括接收第三数据。第三数据包括与处理配方相关联的历史数据。方法进一步包括基于第一数据、第二数据、和第三数据执行指示处理腔室的性能的分析。方法进一步包括致使根据所述分析执行校正动作。