Post-brush cleaning box for chemical mechanical polishing

• Main Author: LIM GARY KWAN HO
• Format: Patent
• Language: Chinese; English
• Published: 05.04.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING; CLEANING IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; METALLURGY; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; PERFORMING OPERATIONS; POLISHING; PREVENTION OF FOULING IN GENERAL; TRANSPORTING

Embodiments provided herein include a system and method for cleaning a first surface of a substrate using a brush carousel assembly. In one embodiment, a brush carousel assembly includes one or more rotatable brush mounting assemblies coupled to a rotatable carriage having a carriage support structure configured to rotate about a carriage axis. The brush carousel assembly further includes a second brush mounting assembly disposed at a second radial distance from the carrier axis and coupled to a support structure of the carrier including one or more rotatable support members. 本文提供的实施例包括一种用于使用刷子转盘组件清洁基板的第一表面的系统和方法。在一个实施例中，刷子转盘组件包括一个或多个可旋转刷子安装组件，所述一个或多个可旋转刷子安装组件耦合到可旋转托架，具有被配置成围绕托架轴线旋转的托架支撑结构。刷子转盘组件进一步包括第二刷子安装组件，所述第二刷子安装组件设置在与托架轴线相距第二径向距离处，并且耦合到托架的包括一个或多个可旋转支撑构件的支撑结构。