Resonator and preparation method thereof

• Main Authors: SUN CHENGLIANG, CAI YAO, SUN BOWEN, ZHOU JIE, LI XIKE, PI BENSONG
• Format: Patent
• Language: Chinese; English
• Published: 05.04.2024
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

The invention provides a resonator and a preparation method thereof, and relates to the technical field of resonators, the resonator comprises a substrate, a bottom electrode, a piezoelectric layer and a top electrode, the bottom electrode, the piezoelectric layer and the top electrode are sequentially stacked on the substrate, the top electrode is provided with a sound reflection part located at the edge of a working area of the resonator, and the sound reflection part is arched towards at least one side deviating from the piezoelectric layer; a plurality of sound reflection parts are arranged on the piezoelectric layer to form a plurality of reflection cavities with the piezoelectric layer, transverse sound waves are reflected by utilizing sound impedance mismatching between air in the reflection cavities and the sound reflection parts, so that the loss of longitudinal energy is reduced, the Q value of the resonator is improved, and the sound reflection parts are arched towards one side deviating from the p