Stud attachment apparatus and stud removal apparatus

• Main Authors: VAN DER MEULEN FRITS, BROUNS DERK SERVATIUS GERTRUDA, DINGS JACOBUS MARIA, AZEREDO LIMA JORGE MANUEL, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, LOOS MICHAEL, KERSTENS ROLAND JACOBUS JOHANNES, KRUIZINGA MATTHIAS, VAN LIEVENGEN ANNE JOHANNES WILHELMUS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, VERBRUGGE BEATRIJS LOUISE MARIE-JOSEPH KATRIEN, KRAMER RONALD HARM GUNTHER, MIDDEL GEERT, THEUERZEIT FRANK JOHANNES CHRISTIAAN, DE KLERK ANGELO CESAR PETER, LEENDERS MARTINUS HENDRIKUS ANTONIUS, LOOPSTRA, ERIK, ROELOF, VAN DEN BOSCH GERRIT, REIJNDERS SILVESTER MATHEUS, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, JANSSEN MAURICE LEONARDUS JOHANNES, DEKKERS JEROEN, KESTERS MARTINUS JOZEF MARIA
• Format: Patent
• Language: Chinese; English
• Published: 05.04.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The present application discloses a stud attachment apparatus, a stud removal apparatus, a method of attaching a pellicle assembly to a patterning device, and a method of removing a stud from a patterning device. The stud attachment apparatus includes a support structure configured to hold a patterning device and a stud manipulator configured to contact a stud with the patterning device, where the stud manipulator is separated from a controlled environment containing the patterning device by a partition region, the partition region includes a hole through which the stud may protrude so as to come into contact with the patterning device. 本申请公开了一种螺柱附接设备、一种螺柱移除设备、一种将表膜组件附接至图案形成装置的方法以及一种从图案形成装置移除螺柱的方法。所述螺柱附接设备包括被配置成保持图案形成装置的支撑结构和被配置成使螺柱接触所述图案形成装置的螺柱操纵器，其中所述螺柱操纵器由分隔区而与容纳图案形成装置的受控环境分离，所述分隔区包括所述螺柱可突出穿过以便与所述图案形成装置接触的孔。