Method for transferring Van der Waals heterojunction

• Main Authors: WANG LEI, GAN QIKANG
• Format: Patent
• Language: Chinese; English
• Published: 02.04.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses a method for transferring a Van der Waals heterojunction. The method comprises the following steps: adhering the Van der Waals heterojunction on a ppc film; the edge of the ppc film is connected with an adhesive tape, and the ppc film is fixed on one end of the pore channel of the glass slide with the hole by the adhesive tape; the other end of the perforated glass slide pore channel is sealed by an adhesive tape to form a closed air cavity; the Van der Waals heterojunction on the ppc film is positioned on the outer side of the closed air cavity; air in the closed air cavity is heated, and the air expands, so that the ppc film is stressed and deformed into an arc-shaped structure; and transferring the Van der Waals heterojunction on the ppc film to a carrier by using a dry transfer technology. According to the method, the precision of positioning the Van der Waals heterojunction on the ppc film is greatly improved, accurate positioning of the falling point after the heterojunction is t