Electro-optical modulator and preparation method thereof

• Main Authors: SHI JIAKANG, TANG JI, CHENG ZHAOYU, LYU XINJIE, SHEN HOUJUN, YIN ZHIJUN, CUI GUOXIN, YE ZHILIN, XU QICHENG
• Format: Patent
• Language: Chinese; English
• Published: 02.04.2024
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The electro-optical modulator comprises a silicon dioxide buffer layer, a lithium niobate waveguide layer, a cladding and electrodes which are sequentially arranged on a silicon-based substrate, and the electrodes comprise a modulation electrode and a bias electrode; the electrodes are distributed on two sides of the waveguide, and the modulation electrode modulates an optical signal in the waveguide through an electro-optical effect; the bias electrode is used for regulating and controlling a bias point of the waveguide; the lithium niobate waveguide layer further comprises an ion implantation lithium niobate layer, and the ion implantation lithium niobate layer is attached to the cladding layer. The direct-current bias point can be controlled in an electric adjusting mode, the electric adjusting speed is high, and energy consumption is low. 本发明公开了一种电光调制器，包括依次设于硅基衬底上的二氧化硅缓冲层、铌酸锂波导层、包层和电极，所述电极包括调制电极和偏置电极；所述电极分布于波导的两侧，调制电极通过电光效应对波导中的光信号进行调制；偏置电极则用于对波导的偏置点进行调控；所述铌酸锂波导层还包括离子注入铌酸锂层，所述离子注入铌酸锂层贴着包层。本发明能采用电调的方式来控制直流