Waveguide structure and manufacturing method thereof

• Main Authors: KANG XIAOXU, CHU ZHENGHUI, ZHONG XIAOLAN
• Format: Patent
• Language: Chinese; English
• Published: 02.04.2024
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The invention provides a waveguide structure and a manufacturing method thereof. The waveguide structure comprises a substrate, a bottom waveguide layer comprising a plurality of first waveguide layers and a top waveguide layer comprising a plurality of second waveguide layers. In the two adjacent second waveguide layers, the second waveguide layer far away from the substrate covers the exposed surface of the second waveguide layer close to the substrate and covers part of the top surface of the bottom waveguide layer, so that the edges of the top surfaces of the two adjacent second waveguide layers are close to each other; and the outline shape of the outer surface presented by the top waveguide layer is approximately arc-shaped, so that the loss in light transmission can be reduced. 本发明提供了一种波导结构及其制造方法。所述波导结构包括衬底、包含若干第一波导层的底部波导层和包含若干第二波导层的顶部波导层。相邻两个所述第二波导层中，远离所述衬底的第二波导层覆盖靠近所述衬底的第二波导层的露出表面，并覆盖所述底部波导层的部分顶面，使相邻两个所述第二波导层的顶面边缘靠近，且所述顶部波导层所呈现的外表面轮廓形状近似弧形，有利于降低光传输中的损耗。