Bearing platform and in-place detection method

• Main Author: XIE YIREN
• Format: Patent
• Language: Chinese; English
• Published: 26.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses a bearing platform and an in-place detection method for the bearing platform. The bearing platform comprises a main body provided with a bearing surface, a lifting driver and two detectors. A movable space is arranged in the main body, a movable part is arranged in the movable space, and a plurality of ejector rods are connected to the movable part. The lifting driver is used for driving the movable part to lift so that the ejector rod can stretch out of the bearing face or retract below the bearing face. A first air passage and a second air passage are arranged in the main body, the first ends of the two air passages are communicated with external air extraction equipment or air supply equipment, and the second ends of the two air passages are respectively communicated with the activity space. A first sealing structure and a second sealing structure are arranged between the second ends of the first air channel and the movable part and between the second ends of the second air channel