High-energy electron microscope system based on high repetition frequency microwave acceleration

The invention discloses a high-energy electron microscope system based on high repetition frequency microwave acceleration. A method corresponding to the system comprises the following steps: generating an initial electron beam by using an electron gun; compressing or accelerating the initial electr...

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Main Authors WANG YIAN, LI RENKAI, ZHU JING, DENG ZHI, LI XUEMING, DU YINGCHAO, SHI JIARU, WANG HONGWEI, CHEN HUAIBI, HUANG WENHUI, TANG CHUANXIANG
Format Patent
LanguageChinese
English
Published 26.03.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Abstract The invention discloses a high-energy electron microscope system based on high repetition frequency microwave acceleration. A method corresponding to the system comprises the following steps: generating an initial electron beam by using an electron gun; compressing or accelerating the initial electron beam to obtain a first electron beam; performing energy dispersion reduction or acceleration operation on electrons in the first electron beam to obtain a second electron beam; shaping the transverse size of the second electron beam electrons to obtain a third electron beam; and carrying out imaging on electrons scattered after passing through the to-be-detected sample in the third electron beam by using a detector. The invention can solve the problems of low energy of a commercial direct-current electric mirror, large volume of a traditional high-energy direct-current electric mirror and low flow intensity and large energy dispersion of a microwave acceleration electron microscope system. 本发明公开了一种基于高重频微波加速的高能电子
AbstractList The invention discloses a high-energy electron microscope system based on high repetition frequency microwave acceleration. A method corresponding to the system comprises the following steps: generating an initial electron beam by using an electron gun; compressing or accelerating the initial electron beam to obtain a first electron beam; performing energy dispersion reduction or acceleration operation on electrons in the first electron beam to obtain a second electron beam; shaping the transverse size of the second electron beam electrons to obtain a third electron beam; and carrying out imaging on electrons scattered after passing through the to-be-detected sample in the third electron beam by using a detector. The invention can solve the problems of low energy of a commercial direct-current electric mirror, large volume of a traditional high-energy direct-current electric mirror and low flow intensity and large energy dispersion of a microwave acceleration electron microscope system. 本发明公开了一种基于高重频微波加速的高能电子
Author WANG YIAN
SHI JIARU
WANG HONGWEI
DENG ZHI
LI RENKAI
HUANG WENHUI
DU YINGCHAO
LI XUEMING
TANG CHUANXIANG
ZHU JING
CHEN HUAIBI
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– fullname: SHI JIARU
– fullname: WANG HONGWEI
– fullname: CHEN HUAIBI
– fullname: HUANG WENHUI
– fullname: TANG CHUANXIANG
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Snippet The invention discloses a high-energy electron microscope system based on high repetition frequency microwave acceleration. A method corresponding to the...
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Title High-energy electron microscope system based on high repetition frequency microwave acceleration
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