High-energy electron microscope system based on high repetition frequency microwave acceleration

• Main Authors: WANG YIAN, LI RENKAI, ZHU JING, DENG ZHI, LI XUEMING, DU YINGCHAO, SHI JIARU, WANG HONGWEI, CHEN HUAIBI, HUANG WENHUI, TANG CHUANXIANG
• Format: Patent
• Language: Chinese; English
• Published: 26.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention discloses a high-energy electron microscope system based on high repetition frequency microwave acceleration. A method corresponding to the system comprises the following steps: generating an initial electron beam by using an electron gun; compressing or accelerating the initial electron beam to obtain a first electron beam; performing energy dispersion reduction or acceleration operation on electrons in the first electron beam to obtain a second electron beam; shaping the transverse size of the second electron beam electrons to obtain a third electron beam; and carrying out imaging on electrons scattered after passing through the to-be-detected sample in the third electron beam by using a detector. The invention can solve the problems of low energy of a commercial direct-current electric mirror, large volume of a traditional high-energy direct-current electric mirror and low flow intensity and large energy dispersion of a microwave acceleration electron microscope system. 本发明公开了一种基于高重频微波加速的高能电子