Silicon-aluminum target material for vacuum coating and preparation method thereof
The invention provides a silicon-aluminum target material for vacuum coating and a preparation method thereof, and relates to the technical field of target material preparation. The preparation method of the silicon-aluminum target material for vacuum coating comprises the following steps: S1, unifo...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
26.03.2024
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Subjects | |
Online Access | Get full text |
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Summary: | The invention provides a silicon-aluminum target material for vacuum coating and a preparation method thereof, and relates to the technical field of target material preparation. The preparation method of the silicon-aluminum target material for vacuum coating comprises the following steps: S1, uniformly mixing aluminum oxide and silicon dioxide, carrying out ball milling treatment, and drying to obtain a silicon-aluminum mixture; s2, the silicon-aluminum mixture is put into a mold to be pressed and formed, and a silicon-aluminum target blank is obtained; and S3, sintering and cooling the silicon-aluminum target blank to obtain the silicon-aluminum target for vacuum coating. The silicon-aluminum target material for vacuum coating provided by the invention is high in density, high in uniformity and small in planeness tolerance.
本发明提供一种真空镀膜用硅铝靶材及其制备方法,涉及靶材制备技术领域。一种真空镀膜用硅铝靶材的制备方法,包括以下步骤:S1、将氧化铝和二氧化硅混合均匀、球磨处理、干燥,得到硅铝混合物;S2、将硅铝混合物放入模具中压制处理成型,得到硅铝靶材胚;S3、将硅铝靶材胚烧结、冷却,得到一种真空镀膜用硅铝靶材。本发明提供的真空镀膜用硅铝靶材密度高、均匀度高、平面度公差小。 |
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Bibliography: | Application Number: CN202311789202 |