Imprint device

An imprint apparatus includes: a first carrier for carrying a flexible stamp having an imprint pattern; and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second bearing piece comprises a chuck; and an interface plate on the chuc...

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Bibliographic Details
Main Authors VERSCHUUREN MARCUS ANTONIUS, PETIT DOMINIQUE MARIE MARIE JOZEF, BALENT JOERG UWE
Format Patent
LanguageChinese
English
Published 19.03.2024
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:An imprint apparatus includes: a first carrier for carrying a flexible stamp having an imprint pattern; and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second bearing piece comprises a chuck; and an interface plate on the chuck, where the interface plate includes an array of openings for receiving an embossed area of one side of the substrate, while an opposite side of the substrate is to be embossed. The chuck includes a fluid channel arrangement for coupling with the openings of the array. 一种压印装置包括：用于承载具有压印图案的柔性印模的第一承载件；以及可相对于第一承载件移动且被配置为承载具有抗蚀剂层的衬底的第二承载件。第二承载件包括卡盘；以及位于卡盘上的接口板，其中接口板包括用于接收衬底的一侧的已压印区域的开口形成的阵列，而衬底的相反侧待被压印。卡盘包括用于与阵列的开口联接的流体通道布置结构。
Bibliography:Application Number: CN202280050829