Efficient and stable semiconductor clamping piece mechanism

• Main Authors: DING SHUANGSHENG, LI JIE, GE LINFENG, MA GUOQUAN, HAN PENGSHUAI
• Format: Patent
• Language: Chinese; English
• Published: 19.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention belongs to the technical field of semiconductor processing, and particularly relates to an efficient and stable semiconductor clamping piece mechanism which comprises two rotating columns and a driving assembly for driving the rotating columns. The driving assembly comprises a driving motor; the middle of the connecting rod is in meshed connection with a motor shaft of the driving motor, the driving motor drives the connecting rod to rotate, one section of the connecting rod is a bent section, one end of the connecting rod is located above one rotating column, the other end of the connecting rod is located below the other rotating column, and the two ends of the connecting rod are in meshed connection with the two rotating columns respectively. And the two rotating columns rotate oppositely. According to the invention, a traditional mode of adopting a gear and the like as a transmission mechanism is abandoned, and the connecting rod is adopted as the transmission mechanism, so that the wafer is