Aerial temporary storage station for carrying wafer cassette and system comprising same

• Main Author: HUANG GUIYANG
• Format: Patent
• Language: Chinese; English
• Published: 15.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention provides an air temporary storage station for carrying wafer cassettes and a system comprising the air temporary storage station, which solve the problems that a loading port is easy to block, the wafer cassettes are difficult to deploy and temporarily store and the like in high-altitude wafer cassette transportation operation, and the air temporary storage station comprises a supporting plate, two parallel slide rails and two lower slide rails, the lower sliding rails are erected at the bottoms of the sliding rails, the rail directions of the lower sliding rails are perpendicular to the sliding rails, connecting rods with adjustable lengths are vertically fixed to the tops of the two sides, corresponding to the sliding rails, of the lower sliding rails and are in sliding connection with the bottom faces of the sliding rails, and the bottom faces of the two lower sliding rails are upwards and slidably connected with vertical plates respectively along the rails. The tail ends, away from the slidi